Dopant and carrier profiling for 3D-device architectures

Mody, JayJayModyKambham, Ajay KumarAjay KumarKambhamZschaetzsch, GerdGerdZschaetzschChiarella, ThomasThomasChiarellaCollaert, NadineNadineCollaertWitters, LiesbethLiesbethWittersEyben, PierrePierreEybenGilbert, MatthieuMatthieuGilbertKoelling, SebastianSebastianKoellingSchulze, AndreasAndreasSchulzeHoffmann, Thomas Y.Thomas Y.HoffmannVandervorst, WilfriedWilfriedVandervorst2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19444Dopant and carrier profiling for 3D-device architecturesProceedings paper