Epitaxial Si/SiGe Multi-Stacks: From Stacked Nano-Sheet to Fork-Sheet and CFET Devices

Loo, RogerRogerLooAkula, AnjaniAnjaniAkulaShimura, YosukeYosukeShimuraPorret, ClémentClémentPorretRosseel, ErikErikRosseelDursap, ThomasThomasDursapHikavyy, AndriyAndriyHikavyyBeggiato, MatteoMatteoBeggiatoBogdanowicz, JanuszJanuszBogdanowiczMerkulov, AlexAlexMerkulovAyyad, MustafaMustafaAyyadHan, HanHanHanRichard, OlivierOlivierRichardImpagnatiello, AndreaAndreaImpagnatielloWang, D.D.WangYamamoto, K.K.YamamotoSipocz, T.T.SipoczKerekes, A.A.KerekesMertens, HansHansMertensHoriguchi, NaotoNaotoHoriguchiLanger, RobertRobertLanger2025-03-062025-01-262025-03-0620252162-8769WOS:001400636100001https://imec-publications.be/handle/20.500.12860/45116Epitaxial Si/SiGe Multi-Stacks: From Stacked Nano-Sheet to Fork-Sheet and CFET DevicesJournal article10.1149/2162-8777/ada79fWOS:001400636100001SIGE