High resolution, quantitative depth profiling analysis of nm thin hgh-k dielectriclayers using medium energy ion scattering (MEIS)

van den Berg, J.A.J.A.van den BergReading, M.A.M.A.ReadingArmour, D.G>D.G>ArmourBailey, P.P.BaileyNoakes, T.C.Q.T.C.Q.NoakesConard, ThierryThierryConardDe Gendt, StefanStefanDe Gendt2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16362High resolution, quantitative depth profiling analysis of nm thin hgh-k dielectriclayers using medium energy ion scattering (MEIS)Proceedings paper