Wet defect etching for defect reveal in epitaxial Ge

Pacco, AntoineAntoinePaccoSchulze, AndreasAndreasSchulzeCaymax, MattyMattyCaymaxHolsteyns, FrankFrankHolsteynsDe Gendt, StefanStefanDe GendtDe Keyzer, EllenEllenDe Keyzer2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25720Wet defect etching for defect reveal in epitaxial GeOral presentationhttp://icds-2015.org/wp-content/uploads/sites/7/2015/07/Posters-program_ICDS-2015.pdf