Chemisorption reaction mechanisms for atomic layer deposition of high-k oxides on high mobility channels

Delabie, AnneliesAnneliesDelabieSioncke, SonjaSonjaSionckeVan Elshocht, SvenSvenVan ElshochtCaymax, MattyMattyCaymaxPourtois, GeoffreyGeoffreyPourtoisPierloot, KristineKristinePierloot2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17004Chemisorption reaction mechanisms for atomic layer deposition of high-k oxides on high mobility channelsMeeting abstract