Identification of Si film traps in p-channel SOI FinFETs using low temperature noise spectroscopy

Achour, H.H.AchourCretu, B.B.CretuSimoen, EddyEddySimoenRoutoure, J.M.J.M.RoutoureCarin, R.R.CarinBenfdila, A.A.BenfdilaAoulaiche, MarcMarcAoulaicheClaeys, CorCorClaeys2021-10-222021-10-2220150038-1101https://imec-publications.be/handle/20.500.12860/24912Identification of Si film traps in p-channel SOI FinFETs using low temperature noise spectroscopyJournal articlehttp://www.sciencedirect.com/science/article/pii/S0038110115000593