Optimizing a thermal based sensor setup for monitoring physical changes of thin films over time using numerivcal modeling

Oudebrouckx, GillesGillesOudebrouckxVandenryt, ThijsThijsVandenrytWagner, PatrickPatrickWagnerThoelen, RonaldRonaldThoelen2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33714Optimizing a thermal based sensor setup for monitoring physical changes of thin films over time using numerivcal modelingMeeting abstract