Grillo, FabioFabioGrilloSoethoudt, JobJobSoethoudtMarques, EstebanEstebanMarquesde Martin, LilianLiliande MartinVan Dongen, KaatKaatVan Dongenvan Ommen, J. RuudJ. Ruudvan OmmenDelabie, AnneliesAnneliesDelabie2022-01-062021-11-022022-01-0620200897-4756WOS:000595526400008https://imec-publications.be/handle/20.500.12860/38282Area-Selective Deposition of Ruthenium by Area-Dependent Surface DiffusionJournal article10.1021/acs.chemmater.0c02588WOS:000595526400008