Plasma enhanced atomic layer deposition of a (nitrogen doped) Ti phosphate coating for improved energy storage in Li-ion batteries

Henderick, LowieLowieHenderickHamed, HamidHamidHamedMattelaer, FelixFelixMattelaerMinjauw, MatthiasMatthiasMinjauwNisula, MikkoMikkoNisulaMeersschaut, JohanJohanMeersschautDendooven, JolienJolienDendoovenSafari, MomoMomoSafariVereecken, PhilippePhilippeVereeckenDetavernier, ChristopheChristopheDetavernier2022-08-182021-11-022022-07-082022-08-1820210378-7753WOS:000647598400007https://imec-publications.be/handle/20.500.12860/37988Plasma enhanced atomic layer deposition of a (nitrogen doped) Ti phosphate coating for improved energy storage in Li-ion batteriesJournal article10.1016/j.jpowsour.2021.229866WOS:000647598400007CATHODE MATERIALSTITANIUM PHOSPHATECONDUCTIVITY