Materials compatibility and organic build-up during ozone-based cleanings of semiconductor devices

De Smedt, FrankFrankDe SmedtDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeynsVinckier, ChrisChrisVinckier2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5205Materials compatibility and organic build-up during ozone-based cleanings of semiconductor devicesProceedings paper