Akheyar, AmalAmalAkheyarLauwers, AnneAnneLauwersLindsay, RichardRichardLindsayde Potter de ten Broeck, MurielMurielde Potter de ten BroeckTempel, GeorgGeorgTempelMaex, KarenKarenMaex2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/5939Analysis of silicide / diffusion contact resistance making use of transmission line stucturesProceedings paper