Improved hot-carrier reliability in a 0.5-µm TLM CMOS process by back-end process optimization

Van den Bosch, GeertGeertVan den BoschDeferm, LudoLudoDefermForester, LynnLynnForesterCollins, TomTomCollins2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/385Improved hot-carrier reliability in a 0.5-µm TLM CMOS process by back-end process optimizationProceedings paper