Leunissen, PeterPeterLeunissenLorusso, GianGianLorussoErcken, MoniqueMoniqueErckenCroon, JeroenJeroenCroonYang, H.H.YangAzordegan, A.A.AzordeganDiBiase, TonyTonyDiBiase2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10773Full spectral analysis of line edge roughnessProceedings paper