A synchrotron radiation photoelectron spectroscopy study on atomic-scale wet etching of InAs (111)-A and (111)-B in acidic peroxide solutions: surface chemistry versus kinetics

Abrenica, GranielGranielAbrenicaLebedev, M. V.M. V.LebedevFingerle, M.M.FingerleArnauts, SophiaSophiaArnautsCalvet, W.W.CalvetMayer, T.T.MayerDe Gendt, StefanStefanDe Gendtvan Dorp, DennisDennisvan Dorp2022-01-192022-01-152022-01-1920222468-5194WOS:000740338100001https://imec-publications.be/handle/20.500.12860/38745A synchrotron radiation photoelectron spectroscopy study on atomic-scale wet etching of InAs (111)-A and (111)-B in acidic peroxide solutions: surface chemistry versus kineticsJournal article10.1016/j.mtchem.2021.100728WOS:000740338100001SEMICONDUCTOR/ELECTROLYTE INTERFACESGAASPASSIVATIONGAAS(100)GROWTHHCLGE