Heyns, MarcMarcHeynsBearda, TwanTwanBeardaCornelissen, IngridIngridCornelissenDe Gendt, StefanStefanDe GendtDegraeve, RobinRobinDegraeveGroeseneken, GuidoGuidoGroesenekenKenens, ConnyConnyKenensKnotter, D. M.D. M.KnotterLoewenstein, LeeLeeLoewensteinMertens, PaulPaulMertensMertens, S.S.MertensMeuris, MarcMarcMeurisNigam, TanyaTanyaNigamSchaekers, MarcMarcSchaekersTeerlinck, IvoIvoTeerlinckVandervorst, WilfriedWilfriedVandervorstVos, RitaRitaVosWolke, K.K.Wolke2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3507Cost-effective cleaning and high-quality thin gate oxidesJournal article