Surface sealing using self-assembled monolayers and its effect on metal diffusion in porous low-k dielectrics studied using monoenergetic positron beams

Uedono, AkiraAkiraUedonoArmini, SilviaSilviaArminiZhang, YuYuZhangKakizaki, TakeakiTakeakiKakizakiKrause-Rehberg, ReinhardReinhardKrause-RehbergAnwand, WolfgangWolfgangAnwandWagner, AndreasAndreasWagner2021-10-232021-10-2320160169-4332https://imec-publications.be/handle/20.500.12860/27413Surface sealing using self-assembled monolayers and its effect on metal diffusion in porous low-k dielectrics studied using monoenergetic positron beamsJournal articlehttp://www.sciencedirect.com/science/article/pii/S0169433216301283