Stress release structures for actuator beams with a stress gradient

Klaasse, GerardGerardKlaassePuers, BobBobPuersTilmans, HarrieHarrieTilmans2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12408Stress release structures for actuator beams with a stress gradientJournal article