Orientational study with EBSD of highly oriented diamond films grown by PECVD

D'Haen, JanJanD'HaenMortet, V.V.MortetHaenen, KenKenHaenenNesladek, MilosMilosNesladekVanecek, M.M.VanecekBergonzo, P.P.Bergonzo2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10386Orientational study with EBSD of highly oriented diamond films grown by PECVDOral presentation