Perspectives on the characterization of elastic properties of thin soft film with acoustic techniques

Iacopi, FrancescaFrancescaIacopiBrongersma, SywertSywertBrongersmaMazurenko, AlexanderAlexanderMazurenkoCarlotti, GiovanniGiovanniCarlottiMaex, KarenKarenMaex2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10627Perspectives on the characterization of elastic properties of thin soft film with acoustic techniquesProceedings paper