Characterization and integration in Cu damascene structures of AURORA, an inorganic low-k dielectric

Alves Donaton, RicardoRicardoAlves DonatonCoenegrachts, BartBartCoenegrachtsSleeckx, ErikErikSleeckxSchaekers, MarcMarcSchaekersSophie, GuusGuusSophieMatsuki, N.N.MatsukiBaklanov, MikhaïlMikhaïlBaklanovStruyf, HerbertHerbertStruyfLepage, MurielMurielLepageVanhaelemeersch, SergeSergeVanhaelemeerschBeyer, GeraldGeraldBeyerStucchi, MicheleMicheleStucchiDe Roest, DavidDavidDe RoestMaex, KarenKarenMaex2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5262Characterization and integration in Cu damascene structures of AURORA, an inorganic low-k dielectricProceedings paper