Model for predicting spurious modes caused by fringing fields in lateral electrostatic actuators for MEM resonators

Stoffels, SteveSteveStoffelsRottenberg, XavierXavierRottenbergBoedecker, SebastianSebastianBoedeckerPuers, BobBobPuersRembe, ChristianChristianRembeTilmans, HarrieHarrieTilmans2021-10-182021-10-182009-06https://imec-publications.be/handle/20.500.12860/16275Model for predicting spurious modes caused by fringing fields in lateral electrostatic actuators for MEM resonatorsProceedings paper