Pattern dependent corrosion effects in HF based post-Cu CMP cleanings

Fyen, WimWimFyenTeerlinck, IvoIvoTeerlinckLagrange, SébastienSébastienLagrangeBrongersma, SywertSywertBrongersmaSteegen, AnAnSteegenMertens, PaulPaulMertensHeyns, MarcMarcHeyns2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5305Pattern dependent corrosion effects in HF based post-Cu CMP cleaningsProceedings paper