Effect of implantation oxide on the Ti- and Co-silicidation of narrow diffusion and poly-lines

Lauwers, AnneAnneLauwersNaem, AbdallaAbdallaNaemde Potter de ten Broeck, MurielMurielde Potter de ten BroeckMaex, KarenKarenMaex2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2711Effect of implantation oxide on the Ti- and Co-silicidation of narrow diffusion and poly-linesJournal article