Jung, Sung-HoonSung-HoonJungRaisanen, PetriPetriRaisanenGivens, MichaelMichaelGivensShero, EricEricSheroDelabie, AnneliesAnneliesDelabieSwerts, JohanJohanSwertsVan Elshocht, SvenSvenVan ElshochtMaes, Jan WillemJan WillemMaes2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17329New mechanisms for ozone-based ALD growth of high-k dielectrics via nitrogen-oxygen speciesProceedings paper