Bargallo Gonzalez, MireiaMireiaBargallo GonzalezSimoen, EddyEddySimoenHikavyy, AndriyAndriyHikavyyVerheyen, PeterPeterVerheyenLoo, RogerRogerLooCaymax, MattyMattyCaymaxMachkaoutsan, VladimirVladimirMachkaoutsanTomasini, PierrePierreTomasiniThomas, S.G.S.G.ThomasWise, RickRickWiseClaeys, CorCorClaeys2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/14945Impact of the pre-epi bake conditions in embedded Si1-xGex source/drain junctionsMeeting abstract