Electrical modeling and design of a wafer-level package for MEM resonators

Perruisseau-Carrier, JulienJulienPerruisseau-CarrierMazza, MarcoMarcoMazzaJourdain, AnneAnneJourdainSkrivervik, AnjaAnjaSkrivervikIonescu, AdrianAdrianIonescuTilmans, HarrieHarrieTilmans2021-10-182021-10-1820101521-3323https://imec-publications.be/handle/20.500.12860/17795Electrical modeling and design of a wafer-level package for MEM resonatorsJournal article