Hybrid long-wavelength IR sensor based on a linear array of poly Si-Ge uncooled microbolometers with a CMOS readout

Kavadias, SpyrosSpyrosKavadiasDe Moor, PietPietDe MoorGastal, MartinMartinGastalHendrikx, NikiNikiHendrikxWirix, FilipFilipWirixVan Hoof, ChrisChrisVan Hoof2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5393Hybrid long-wavelength IR sensor based on a linear array of poly Si-Ge uncooled microbolometers with a CMOS readoutProceedings paper