Non-contact metrology for inversion charge carrier mobility by corona charge and photovoltage measurements on blank wafers with a gate dielectric

Everaert, Jean-LucJean-LucEveraertRosseel, ErikErikRosseelPap, AronAronPapMeszaros, AlbertAlbertMeszarosDekoster, JohanJohanDekosterPavelka, TiborTiborPavelka2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17088Non-contact metrology for inversion charge carrier mobility by corona charge and photovoltage measurements on blank wafers with a gate dielectricOral presentationhttp://www.wodim2010.sk/program.html