Defect-free isolation on high-thermal-conductivity SOI substrates for complementary BiCMOS technology

Van Wichelen, KoenKoenVan WichelenOng, PatrickPatrickOngMoussa, AlainAlainMoussaRadisic, DunjaDunjaRadisicDevriendt, KatiaKatiaDevriendtHalder, SandipSandipHalderKenis, KarineKarineKenisLee, WillieWillieLeeVandevelde, BartBartVandeveldeSoonekindt, ChristopheChristopheSoonekindtShahar, Abdul HadiAbdul HadiShaharSmet, TomTomSmetVan Huylenbroeck, StefaanStefaanVan HuylenbroeckDecoutere, StefaanStefaanDecoutereSeacrist, MikeMikeSeacristRies, MikeMikeRiesDrobny, VladimirVladimirDrobnyWise, RickRickWise2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16415Defect-free isolation on high-thermal-conductivity SOI substrates for complementary BiCMOS technologyProceedings paper