Heck, JohnJohnHeckAdams, DonDonAdamsBelov, NicolaiNicolaiBelovChou, T-K.A.T-K.A.ChouKim, B.B.KimMa, Q.Q.MaRao, V.V.RaoSeveri, SimoneSimoneSeveriTchelepi, G.G.TchelepiWitvrouw, AnnAnnWitvrouw2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15447Ultra-high data density MEMS memory deviceMeeting abstract