Time-frequency analysis assisted determination of ruthenium optical constants in the sub-EUV spectral range 8 nm-23.75 nm

Saadeh, QaisQaisSaadehNaujok, PhilippPhilippNaujokPhilipsen, VickyVickyPhilipsenHoenicke, PhilippPhilippHoenickeLaubis, ChristianChristianLaubisBuchholz, ChristianChristianBuchholzAndrle, AnnaAnnaAndrleStadelhoff, ChristianChristianStadelhoffMentzel, HeikoHeikoMentzelSchoenstedt, AnjaAnjaSchoenstedtSoltwisch, VictorVictorSoltwischScholze, FrankFrankScholze2022-04-212021-12-232022-03-282022-04-082022-04-2120211094-4087WOS:000726115900025https://imec-publications.be/handle/20.500.12860/38655Time-frequency analysis assisted determination of ruthenium optical constants in the sub-EUV spectral range 8 nm-23.75 nmJournal article10.1364/OE.426029WOS:000726115900025X-RAY REFLECTIVITYTHIN-FILMREFLECTOMETRYREFLECTANCESURFACELAYERPHOTOABSORPTIONULTRAVIOLETTRANSFORMOPTIMIZATION