Sagi, K.V.K.V.SagiAmanapu, H.P.H.P.AmanapuTeugels, LieveLieveTeugelsBabu, S.V.S.V.Babu2021-10-222021-10-2220142162-8769https://imec-publications.be/handle/20.500.12860/24475Investigation of guanidine carbonate-based slurries for chemical Mechanical polishing of Ru/TiN barrier films with minimal corrosionJournal articlehttp://jss.ecsdl.org/content/3/7/P227/F5.expansion.html