Assessing reliability of nano-scaled CMOS technologies one defect at a time

Kaczer, BenBenKaczerGrasser, TiborTiborGrasserFranco, JacopoJacopoFrancoToledano Luque, MariaMariaToledano LuqueWeckx, PieterPieterWeckxRoussel, PhilippePhilippeRousselGroeseneken, GuidoGuidoGroeseneken2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20889Assessing reliability of nano-scaled CMOS technologies one defect at a timeProceedings paperhttp://www.ee.iitb.ac.in/~icee/pdf/ICEE_2012_TCP.pdf