Vandervorst, WilfriedWilfriedVandervorstBender, HugoHugoBenderConard, ThierryThierryConardRichard, OlivierOlivierRichardZhao, ChaoChaoZhaoBrijs, BertBertBrijsCaymax, MattyMattyCaymaxDe Gendt, StefanStefanDe GendtCosnier, VincentVincentCosnierChen, JerryJerryChenKluth, J.J.KluthCartier, EduardEduardCartierGreen, MartinMartinGreen2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6982Physical characterisation of high-gate stacksOral presentation