Kauerauf, ThomasThomasKaueraufBranka, AnnaAnnaBrankaCroes, KristofKristofCroesRedolfi, AugustoAugustoRedolfiCivale, YannYannCivaleTorregiani, CristinaCristinaTorregianiGroeseneken, GuidoGuidoGroesenekenBeyne, EricEricBeyne2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22570Effect of TSV presence on FEOL yield and reliabilityProceedings paper