Peng, LanLanPengKim, Soon-WookSoon-WookKimIacovo, SerenaSerenaIacovoDe Vos, JoeriJoeriDe VosSchoenaers, B.B.SchoenaersStesmans, A.A.StesmansAfanas'ev, V. V.V. V.Afanas'evMiller, AndyAndyMillerBeyer, GeraldGeraldBeyerBeyne, EricEricBeyne2022-01-132021-11-022022-01-132020naWOS:000652345300099https://imec-publications.be/handle/20.500.12860/37918Investigation of Paramagnetic Defects in SiCN and SiCO-based Wafer BondingProceedings paper10.1109/EPTC50525.2020.9315054978-1-7281-8911-6WOS:000652345300099