Vandersmissen, RafRafVandersmissenvan der Zanden, KoenKoenvan der ZandenSchreurs, DominiqueDominiqueSchreursBorghs, GustaafGustaafBorghs2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5774Germanium devices: hybrid integration and substrate removalProceedings paper