Fundamental study of IMC grains at low anneal temperature

Gerets, CarineCarineGeretsDerakhshandeh, JaberJaberDerakhshandehShafahian, EhsanEhsanShafahianCochet, TomTomCochetLa Tulipe, Douglas CharlesDouglas CharlesLa TulipeBeyer, GeraldGeraldBeyerMiller, AndyAndyMillerBeyne, EricEricBeyne2023-06-202022-09-222023-06-202022naWOS:000851392600067https://imec-publications.be/handle/20.500.12860/40472Fundamental study of IMC grains at low anneal temperatureProceedings paper978-4-9911911-3-8WOS:000851392600067