Evaluation of the junction delineation accuracy and reproducibility with the SSRM technique

Eyben, PierrePierreEybenVanhaeren, DanielleDanielleVanhaerenJanssens, TomTomJanssensHantschel, ThomasThomasHantschelVandervorst, WilfriedWilfriedVandervorstAdachi, KannaKannaAdachiIshimaru, KazunariKazunariIshimaru2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12142Evaluation of the junction delineation accuracy and reproducibility with the SSRM techniqueJournal article