Martin Hoyas, AnaAnaMartin HoyasTravaly, YoussefYoussefTravalySchuhmacher, JorgJorgSchuhmacherSajavaara, TimoTimoSajavaaraWhelan, CarolineCarolineWhelanEyckens, BrendaBrendaEyckensRichard, OlivierOlivierRichardGiangrandi,GiangrandiBrijs, BertBertBrijsJonas, A.M.A.M.JonasVantomme, AndreAndreVantommeVandervorst, WilfriedWilfriedVandervorstCelis, Jean-PierreJean-PierreCelisMaex, KarenKarenMaex2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10866Characterization of the growth of atomic layer deposited WNxCy films on various substratesOral presentation