An improved CMP process for integration of high mobility channel materials

Teugels, LieveLieveTeugelsOng, PatrickPatrickOngAnsar, SheikSheikAnsarDelande, TinneTinneDelandeBhonsle, RithuRithuBhonsleSiebert, MaxMaxSiebertGarcia Romero, IvanIvanGarcia RomeroStruyf, HerbertHerbertStruyfLeunissen, LeonardusLeonardusLeunissen2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27389An improved CMP process for integration of high mobility channel materialsMeeting abstracthttp://www.canevent.com/upload/microInvite/file/8491/1476432747021046704.pdf