Study of DC stress induced leakage current (SILC) and its dependence on oxide nitridation

De Blauwe, JanJanDe BlauweDegraeve, RobinRobinDegraeveBellens, RudiRudiBellensVan Houdt, JanJanVan HoudtRoussel, PhilippePhilippeRousselGroeseneken, GuidoGuidoGroesenekenMaes, HermanHermanMaes2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1149Study of DC stress induced leakage current (SILC) and its dependence on oxide nitridationProceedings paper