Simultaneous extraction of the silicon film and front oxide thickness on fully depleted SOI nMOSFETs

Nicolett, A. S.A. S.NicolettMartino, Joao AntonioJoao AntonioMartinoSimoen, EddyEddySimoenClaeys, CorCorClaeys2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4622Simultaneous extraction of the silicon film and front oxide thickness on fully depleted SOI nMOSFETsJournal article