Comparison between Si/SiO2 mid-gap interface states and deep levels associated with silicon-oxygen superlattices in p-type silicon

Simoen, EddyEddySimoenJayachandran, SuseendranSuseendranJayachandranDelabie, AnneliesAnneliesDelabieCaymax, MattyMattyCaymaxHeyns, MarcMarcHeyns2021-10-232021-10-2320161610-1634https://imec-publications.be/handle/20.500.12860/27319Comparison between Si/SiO2 mid-gap interface states and deep levels associated with silicon-oxygen superlattices in p-type siliconJournal articlehttp://onlinelibrary.wiley.com/doi/10.1002/pssc.201600018/abstract