Litho Process Development for Pillars to Enable High Density 4F<SUP>2</SUP> Memory Cells at 34nm Pitch

Pak, MuratMuratPakDauendorffer, A.A.DauendorfferNafus, K.K.NafusDas, ArijitArijitDasHasan, MahmudulMahmudulHasanRincon Delgadillo, PaulinaPaulinaRincon Delgadillo2024-05-232024-01-132024-05-232023978-1-5106-6748-80277-786XWOS:001125089900003https://imec-publications.be/handle/20.500.12860/43407Litho Process Development for Pillars to Enable High Density 4F<SUP>2</SUP> Memory Cells at 34nm PitchProceedings paper10.1117/12.2686265978-1-5106-6749-5WOS:001125089900003