Thin silicon layer as heat channel for low-loss SiN tunable devices

Caer, CharlesCharlesCaerDwivedi, Sarvagya PaavanSarvagya PaavanDwivedi2023-01-202022-11-072023-01-2020212374-0140WOS:000866488100148https://imec-publications.be/handle/20.500.12860/40691Thin silicon layer as heat channel for low-loss SiN tunable devicesProceedings paper10.1109/IPC48725.2021.9592989978-1-6654-1601-6WOS:000866488100148