High-quality cubic BN thin films prepared by rf magnetron sputtering without argonion bombardment

Wang, Q.Q.WangYin, H.H.YinPunniyakoti, S.S.PunniyakotiShan, L.L.ShanD'Olieslaeger, MarcMarcD'OlieslaegerHaenen, KenKenHaenenBoyen, Hans-GerdHans-GerdBoyen2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21838High-quality cubic BN thin films prepared by rf magnetron sputtering without argonion bombardmentOral presentation