Goloudina, S.I.S.I.GoloudinaIvanov, A.S.A.S.IvanovKrishtab, M.B.M.B.KrishtabLuchinin, V.V.V.V.LuchininPasyuta, V.M.V.M.PasyutaGofman, I.V.I.V.GofmanSklizkova, V.P.V.P.SklizkovaKudryavtsev, V.V.V.V.KudryavtsevBaklanov, MikhaïlMikhaïlBaklanov2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20732Pore sealing of SiOCH ultra low-k dielectrics with polyimide Langmuir-Blodgett filmProceedings paper