Patterning aspects of SiGe/Ge BFFT fabrication

Milenin, AlexeyAlexeyMileninWitters, LiesbethLiesbethWittersDemand, MarcMarcDemand2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22807Patterning aspects of SiGe/Ge BFFT fabricationProceedings paperhttp://ecst.ecsdl.org/content/50/46/3.full.pdf+html?sid=b3b2fa71-a9da-4824-8d34-ab23068db0f1