Camerotto, ElisabethElisabethCamerottoBrems, StevenStevenBremsHauptmann, MarcMarcHauptmannLurquin, JelleJelleLurquinStruyf, HerbertHerbertStruyfMertens, PaulPaulMertensDe Gendt, StefanStefanDe Gendt2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22096Towards an improved megasonic cleaning process: influence of surface tension on bubble activity in acoustic fieldsProceedings paper